Axial nano-displacement measurement with high resolution and wide range based on asymmetrical illumination

被引：3

作者：

Li, Shuai ^{[1
]}

Kuang, Cuifang ^{[1
]}

Ge, Jianhong ^{[1
]}

Liu, Xu ^{[1
]}

机构：

[1] Zhejiang Univ, State key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 06期

基金：

中国国家自然科学基金; 国家教育部博士点专项基金资助;

关键词：

BESSEL-GAUSS BEAMS; LASER; INTERFEROMETRY; NONLINEARITY; SYSTEM;

D O I：

10.1364/OE.21.007528

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a novel axial nano-displacement measuring approach. Based on asymmetrical illumination, the axial drifts of the sample plane can be measured by detecting the position of the centroid of the focal spot. Both CCD and QD are used as the detector in the system and two data processing models are designed. With a relatively simple and applicable configuration, the proposed system can realize a wide measuring range of > 4 lambda and a high axial resolution of 2nm. Moreover, the presented approach is immune to the influence caused by the energy fluctuation of the laser source. Possessing these advantages, this measuring method has big potential to be applied in modern engineering and scientific researches. (c) 2013 Optical Society of America

引用

页码：7528 / 7537

页数：10

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