Design and Simulation of a Micromachined Membrane Flow-Meter

被引：0
|
作者：
Yaghmourali, Yousef Valizadeh [1 ]
Tavakoli, Hadi [1 ]
Sani, Ebrahim Abbaspour [1 ]
机构：
[1] Urmia Univ, Microelect Res Lab, Orumiyeh 57159, Iran
来源：
2016 24TH IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE) | 2016年
关键词：
component: Piezoresistive; MEMS; Flow Velocity; Flowmeter; Sensitivity; FLOW SENSORS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a new piezoresistive flow -meter has been proposed. For enhancement of sensitivity, a large membrane is placed vertically against the flow direction to maximize the air drag force. In the new proposed structure supporting beams do not scale up the total die -size, and due to large torsion spring constant, considerable incensement in mechanical stability is achieved. The range of measureable flow is 0-6m/s, and maximum variation of piezoresistors is 3.6 percent. Bulk micromachining technology is proposed for fabrication process and total die -size of flowmeter is 1.5x1.5 mm(2).
引用
收藏
页码：828 / 831
页数：4
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