Nanostructure, mechanical and tribological properties of reactive magnetron sputtered TiCx coatings

被引：62
|
作者：
Polychronopoulou, K. [1 ,2 ]
Rebholz, C. [1 ]
Baker, M. A. [3 ]
Theodorou, L. [1 ]
Demas, N. G. [2 ]
Hinder, S. J. [3 ]
Polycarpou, A. A. [2 ]
Doumanidis, C. C. [1 ,4 ]
Boebel, K. [5 ]
机构：
[1] Univ Cyprus, Dept Mech & Mfg Engn, CY-1678 Nicosia, Cyprus
[2] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
[3] Univ Surrey, Fac Engn & Phys Sci, Surface Anal Lab, Guildford GU2 7XH, Surrey, England
[4] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
[5] Robert Bosch GmbH, Business Unit Assembly Syst & Special Machinery, Plasmatechnol, D-70442 Stuttgart, Germany
来源：
DIAMOND AND RELATED MATERIALS | 2008年 / 17卷 / 12期
关键词：
Diamond-like carbon; Nanocrystalline; sputtering; Tribology;
D O I：
10.1016/j.diamond.2008.07.007
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This study describes the correlation between microstructure, mechanical and tribological Properties or TiCx, coatings (with x being in the range of 0-1.4). deposited by reactive magnetron sputtering from a Ti target in Ar/C2H2 mixtures at similar to 200 degrees C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and high hardness, combined with low wear rates and friction coefficients, were observed for coatings with chemical composition close to TiC. X-ray diffraction and X-ray photoelectron spectroscopy analysis. used to evaluate coating microstructure, composition and relative phase fraction, showed that low carbons contents in the coatings lead to sub-stoichiometric nanocrystalline TiC, coatings being deposited, whilst higher carbon contents gave rise to dual phase nanocomposite coatings consisting of stoichiometric TiC nanocrystallites and free amorphous Carbon. Optimum performance was observed for nanocomposite TiC1,1 coatings, comprised of nanocrystalline nc-TiC (with ail average grain size of similar to 15 nm) Separated by 2-3 monolayers of an amorphous a-DLC matrix phase. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：2054 / 2061
页数：8
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