Electrostatically-driven-leverage actuator as an engine for out-of-plane motion

被引：0

作者：

Lin, HY ^{[1
]}

Hu, HH ^{[1
]}

Fang, WL ^{[1
]}

Huang, RS ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

electrostatically-driven-leverage actuator (EDLA); MOSBE processes; air exhaust groove;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

An Electrostatic al ly-Driven-Leverage actuator (EDLA Engine) is proposed as an elementary actuation unit for out-of-plane motion. The EDLA Engine consists of a near-gap electrode and a rigid lever-mechanism. The lever-mechanism magnify the motion of the electrode; thus, the EDLA Engine has a large displacement (> 15 mum) and a low driving voltage (< 25 Volt). To improve the performances of EDLA Engine, the shape of electrodes was modified and air exhaust grooves was added on the substrate. Since the EDLA Engine can be integrated with passive elements for various applications, it is regarded as a universal out-of-plane engine.

引用

页码：740 / 743

页数：4

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