Mode Coupling and Parametric Resonance in Electrostatically Actuated Micromirrors

被引：17

作者：

Frangi, Attilio ^{[1
]}

Guerrieri, Andrea ^{[1
]}

Boni, Nicolo ^{[2
]}

Carminati, Roberto ^{[2
]}

Soldo, Marco ^{[2
]}

Mendicino, Gianluca ^{[2
]}

机构：

[1] Politecn Milan, Dept Civil & Environm Engn, I-20133 Milan, Italy

[2] ST Microelect, MSH Div, I-20010 Cornaredo, Italy

来源：

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS | 2018年 / 65卷 / 07期

关键词：

Continuation approaches; Mathieu equation; micromirrors; microelectromechanical system (MEMS); parametric resonance; MEMS; AMPLIFICATION;

D O I：

10.1109/TIE.2017.2774729

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The main torsional mode of electrostatically actuated micromirrors is known to be dominated by parametric resonance when the actuation is performed via in-plane comb fingers. Here, we show that, for specific geometrical features of the mirror, parametric resonance simultaneously activates a spurious yaw mode. Due to the large torsional rotations, the two modes are nonlinearly coupled, inducing mutual stiffness variations and an unexpected temperature dependence of the main mode. After presenting an experimental evidence of the coupling, we develop and discuss a numerical model capable of capturing the key phenomena and of providing guidelines for a robust design.

引用

页码：5962 / 5969

页数：8

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