MEMS Technology for Miniaturized Space Systems: Needs, Status and Perspectives

被引：1
|
作者：
Gill, E. [1 ]
Guo, J. [1 ]
机构：
[1] Delft Univ Technol, Fac Aerosp Engn, NL-2629 HS Delft, Netherlands
来源：
RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS AND NANODEVICES XI | 2012年 / 8250卷
关键词：
MEMS; space systems; miniaturization;
D O I：
10.1117/12.907450
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS technology for miniaturized space system from the perspective of a spacecraft developer. First, the needs of future space missions on MEMS components are discussed. Then, the state-of-the-art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends.
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页数：10
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