Diffractive optical Elements based on subwavelength high-contrast Gratings

被引：3

作者：

Kroker, Stefanie ^{[1
]}

Kaesebier, Thomas ^{[1
]}

Weber, Thomas ^{[1
]}

Steiner, Stefan ^{[1
]}

Fuchs, Frank ^{[2
]}

Kley, Ernst-Bernhard ^{[1
]}

Tuennermann, Andreas ^{[1
,2
]}

机构：

[1] Abbe Ctr Photon, Inst Appl Phys, Max Wien Pl 1, D-07743 Jena, Germany

[2] Fraunhofer Inst Angewandte Opt & Feinmechan, D-07745 Jena, Germany

来源：

HIGH CONTRAST METASTRUCTURES | 2012年 / 8270卷

关键词：

high-contrast gratings; diffraction gratings; broadband reflectors; GRAVITATIONAL-WAVE DETECTORS; THERMAL NOISE; REFLECTORS; CAVITY; LASER;

D O I：

10.1117/12.908145

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on novel concepts for reflective diffractive elements based on high-contrast gratings. To demonstrate the possibilities for such devices reflective cavity couplers with three output ports are investigated. A diffracting period is superposed to a highly reflective subwavelength grating in order to realize diffractive elements. This superposition can be realized with a periodic depth, fill factor or period modulation of the reflector. Further, to limit the total transmission of the device it is necessary to enhance its angular tolerance. We discuss different approaches in order to realize this increased reflectivity in broad range of the angular spectrum. The contribution focuses on the material combination silicon-silica, but the presented concepts also hold for other material combinations with large index contrast and even for monolithic silicon structures.

引用

页数：8

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