Properties of a p-n Junction Formed in a Porous Silicon Film Grown by Metal-Assisted Chemical Etching

被引:1
|
作者
Melnik, N. N. [1 ]
Tregulov, V. V. [2 ]
Skoptsova, G. N. [2 ]
Ivanov, A. I. [2 ]
Kostsov, D. S. [1 ]
机构
[1] Russian Acad Sci, Lebedev Phys Inst, Moscow 119991, Russia
[2] Yesenin Ryazan State Univ, Ryazan 390000, Russia
关键词
porous silicon; metal-assisted chemical etching; p-n junction; diffusion; Raman scattering; photovoltaic characteristics; current-voltage characteristics; charge carrier transport;
D O I
10.3103/S1068335622090044
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The results of the study of the semiconductor structure with a p-n junction formed by thermal diffusion of phosphorus into a p-type porous silicon film are presented. The porous film was grown by metal-assisted chemical etching. It is shown that diffusion is accompanied by a decrease in silicon crystallite sizes in the porous layer. In the base region of the p-n junction, a quantum-size effect appears, leading to band gap widening. The observed charge carrier transfer mechanisms are characteristic of p-n junctions containing traps.
引用
收藏
页码:271 / 275
页数:5
相关论文
共 50 条
  • [21] Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
    Nur'aini, Anafi
    Oh, Ilwhan
    ACS OMEGA, 2022, 7 (19): : 16665 - 16669
  • [22] Structure and Electrochemical Properties of Hierarchically Porous Silicon Film Prepared with the Combination of Magnetron Sputtering Deposition and Metal-Assisted Chemical Etching
    Zhao, Yan
    Liu, Zhengjun
    Liang, Chunyong
    Maximov, M. Yu.
    Liu, Baoxi
    Wang, Junming
    Yin, Fuxing
    INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE, 2017, 12 (09): : 8591 - 8598
  • [23] p-n junction formed in structures with macro-porous silicon
    Grigoras, K
    Jasutis, V
    Pacebutas, V
    Sabataityte, J
    Simkiene, I
    APPLIED SURFACE SCIENCE, 2000, 166 (1-4) : 532 - 537
  • [24] Silicon Nanostructures Fabricated by Metal-Assisted Chemical Etching of Silicon
    Oh, Ilwhan
    JOURNAL OF THE KOREAN ELECTROCHEMICAL SOCIETY, 2013, 16 (01): : 1 - 8
  • [25] Thermoelectric generator using nanoporous silicon formed by metal-assisted chemical etching method
    Van Toan, Nguyen
    Li, Yijie
    Tuoi, Truong Thi Kim
    Sabran, Nuur Syahidah
    Kiat, Jun Hieng
    Voiculescu, Ioana
    Ono, Takahito
    ENERGY CONVERSION AND MANAGEMENT, 2025, 323
  • [26] Chemical Excitation of Silicon Photoconductors by Metal-Assisted Chemical Etching
    Li, Shengyang
    Ayedh, Hussein M.
    Yli-Koski, Marko
    Vahanissi, Ville
    Savin, Hele
    Oksanen, Jani
    JOURNAL OF PHYSICAL CHEMISTRY C, 2023, 127 (08): : 4072 - 4078
  • [27] Silicon Nanostructures Formed by Metal-Assisted Chemical Etching for Electron Field Emission Cathodes
    Evtukh, Anatoliy
    Steblova, Olga
    Bratus', Oleg
    Druzhinin, Anatoly
    Nichkalo, Stepan
    2016 13TH INTERNATIONAL CONFERENCE ON MODERN PROBLEMS OF RADIO ENGINEERING, TELECOMMUNICATIONS AND COMPUTER SCIENCE (TCSET), 2016, : 384 - 387
  • [28] Metal-assisted chemical etching of silicon and nanotechnology applications
    Han, Hee
    Huang, Zhipeng
    Lee, Woo
    NANO TODAY, 2014, 9 (03) : 271 - 304
  • [29] Vapor Phase Metal-Assisted Chemical Etching of Silicon
    Hildreth, Owen J.
    Schmidt, Daniel R.
    ADVANCED FUNCTIONAL MATERIALS, 2014, 24 (24) : 3827 - 3833
  • [30] Metal-Assisted Chemical Etching of Silicon for Photovoltaic Application
    Koval, Viktoriia
    Yakymenko, Yuriy
    Ivashchuk, Anatoliy
    Dusheyko, Mykhailo
    Masalskyi, Oleksandr
    Koliada, Mykola
    Kulish, Dmytro
    2019 IEEE 39TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO), 2019, : 282 - 287