Device physics -: In search of low-k dielectrics

被引：326
|
作者：
Miller, RD [1 ]
机构：
[1] IBM Corp, Almaden Res Ctr, Div Res, San Jose, CA 95120 USA
来源：
SCIENCE | 1999年 / 286卷 / 5439期
关键词：
D O I：
10.1126/science.286.5439.421
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：421 / +
页数：2
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