Micro structuring of borosilicate glass by high-temperature micro-forming

被引：9
|
作者：
Schubert, Andreas [1 ]
Edelmann, Jan [1 ]
Burkhardt, Thomas [1 ]
机构：
[1] Fraunhofer Inst Machine Tools & Forming Technol I, Chemnitz, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 08期
关键词：
Tool Material; Isothermal Tempering; High Surface Quality; Glass Wafer; Aluminium Nitride;
D O I：
10.1007/s00542-005-0074-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex(R)7740), by means of forming at high temperatures with a micro-structured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.
引用
收藏
页码：790 / 795
页数：6
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