High-quality bilayer graphene grown on softened copper foils by atmospheric pressure chemical vapor deposition

被引:13
|
作者
Chen, Qiao [1 ,2 ,3 ]
Song, Qiyang [1 ,2 ]
Yi, Xin [1 ,2 ]
Chen, Qiao [1 ,2 ,3 ]
Wu, Wenjia [1 ,2 ]
Huang, Meirong [3 ]
Zhao, Chuanwen [1 ,2 ]
Wang, Shun [1 ,2 ,4 ]
Zhu, Hongwei [3 ]
机构
[1] Huazhong Univ Sci & Technol, MOE Key Lab Fundamental Phys Quant Measurement, Sch Phys, Wuhan 430074, Peoples R China
[2] Huazhong Univ Sci & Technol, Hubei Key Lab Gravitat & Quantum Phys, Sch Phys, Wuhan 430074, Peoples R China
[3] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[4] Shenzhen Huazhong Univ Sci & Technol, Res Inst, Shenzhen 518057, Peoples R China
基金
中国博士后科学基金;
关键词
graphene; bilayer; chemical vapor deposition; Cu foil; SINGLE-CRYSTAL GRAPHENE; OXYGEN; NUCLEATION; KINETICS; DOMAINS; BANDGAP; FILMS;
D O I
10.1007/s40843-020-1394-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bilayer graphene (BLG) shows great application prospect and potential in next-generation electronics because of its unique electrical and mechanical properties. However, the scalable synthesis of large-area high-quality BLG films is still a great challenge, despite the maturity of chemical vapor deposition (CVD) technique. In this study, we report a robust method to grow BLGs on flat, softened Cu foils by atmospheric pressure CVD. A moderate amount of residual oxygen accelerates the growth of BLG domains while suppressing the formation of multilayers. Raising the nucleation density at low hydrogen pressure efficiently increases the film continuity. Based on the optimized CVD process, the growth of graphene films on 4x4 cm(2)Cu foils with an average BLG coverage of 76% is achieved. The morphology and structure characterizations demonstrate a high quality of the BLG. Dual gate field-effect transistors are investigated based on AB-stacked BLG, with a tunable bandgap and high carrier mobility of up to 6790 cm(2)V(-1)s(-1)at room temperature.
引用
收藏
页码:1973 / 1982
页数:10
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