Photoablation of graphite target using a KrF excimer laser and application to deposition of hard carbon thin films

被引：0
|
作者：
Catherinot, A [1 ]
Germain, C [1 ]
Aubreton, J [1 ]
机构：
[1] FAC SCI,EQUIPE PLASMAS LASERS MAT,URA 320 CNRS,LAB MAT CERAM & TRAITEMENTS SURFACE,F-87060 LIMOGES,FRANCE
来源：
ALT '95 INTERNATIONAL SYMPOSIUM ON ADVANCED MATERIALS FOR OPTICS AND OPTOELECTRONICS | 1996年 / 2777卷
关键词：
laser ablation thin film deposition; carbon; diamond;
D O I：
10.1117/12.232205
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：98 / 106
页数：9
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