Structural and electrical properties of GaSb, AlGaSb and their heterostructures grown on GaAs by metalorganic chemical vapor deposition

被引:6
|
作者
Wang, PY [1 ]
Chen, JF [1 ]
Chen, WK [1 ]
机构
[1] NATL CHAIO TUNG UNIV,DEPT ELECTROPHYS,HSINCHU,TAIWAN
关键词
D O I
10.1016/0022-0248(95)00914-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A systematic study of structural and electrical properties of GaSb and AlGaSb grown on GaAs by metalorganic chemical vapor deposition is reported. In general, the results obtained from surface morphologies, X-ray linewidths and Hall properties are consistent with each other and indicate that the optimal growth conditions for GaSb are at 525 degrees C around V/III = 1. A highest hole mobility of 652 cm(2)/V . s at RT (3208 cm(2)/V . s at 77 K) and a lowest concentration of 2.8 x 10(16) cm(-3) (1.2 X 10(15) cm(-3) at 77 K) were obtained for GaSb grown under this optimal condition. Compared to the GaSb growth, a smaller V/III ratio is needed for the AlGaSb growth to protect the surface morphology. When Al was incorporated into GaSb growth, mobility decreased and carrier concentration increased sharply. The AlGaSb grown at 600 degrees C had a background concentration about one order of magnitude lower than the AlGaSb grown at 680 degrees C. Room-temperature current-voltage characteristics of GaSb/AlxGa1-xSb/GaSb show a rectifying feature when Al composition x is higher than 0.3, suggesting a valence-band discontinuity at the AlGaSb/GaSb interface. A leakage current much higher than the value predicted by the thermionic emission theory is observed at 77 K, presumably due to a large number of dislocations generated by the huge lattice mismatch between GaSb and GaAs.
引用
收藏
页码:241 / 249
页数:9
相关论文
共 50 条
  • [31] Influences of initial buffer layer deposition on electrical and optical properties in cubic GaN grown on GaAs(100) by metalorganic chemical vapor deposition
    Xu, DP
    Yang, H
    Li, JB
    Li, SF
    Zhao, DG
    Wang, YT
    Sun, XL
    Wu, RH
    THIN SOLID FILMS, 2000, 368 (02) : 279 - 282
  • [32] Optical and structural characterization of InGaN quantum-well heterostructures grown by metalorganic chemical vapor deposition
    Dupuis, RD
    Grudowski, PA
    Eiting, CJ
    Shmagin, IC
    Kolbas, RM
    Rosner, SJ
    1997 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 1998, : 231 - 234
  • [33] GROWTH MECHANISMS OF GAASP/GAAS HETEROSTRUCTURES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    JENG, SJ
    WAYMAN, CM
    COSTRINI, G
    GIVENS, ME
    EMANUEL, MA
    COLEMAN, JJ
    JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) : 425 - 430
  • [35] Optical and structural characterization of InGaN quantum-well heterostructures grown by metalorganic chemical vapor deposition
    Dupuis, RD
    Grudowski, PA
    Eiting, CJ
    Shmagin, IC
    Kolbas, RM
    Rosner, SJ
    COMPOUND SEMICONDUCTORS 1997, 1998, 156 : 231 - 234
  • [36] Dislocation reduction of GaSb on GaAs by metalorganic chemical vapor deposition with epitaxial lateral overgrowth
    Zaima, Kotaro
    Hashimoto, Rei
    Ezaki, Mizunori
    Nishioka, Masao
    Arakawa, Yasuhiko
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (23) : 4843 - 4845
  • [37] Structural and luminescent properties of ZnTe film grown on silicon by metalorganic chemical vapor deposition
    Shan, CX
    Fan, XW
    Zhang, JY
    Zhang, ZZ
    Wang, XH
    Ma, JG
    Lu, YM
    Liu, YC
    Shen, DZ
    Kong, XG
    Zhong, GZ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (06): : 1886 - 1890
  • [38] Optical, Structural Properties and Experimental Procedures of GaGdN Grown by Metalorganic Chemical Vapor Deposition
    Hung, I-Hsiang
    Lai, Yu-Hsiang
    Feng, Zhe Chuan
    Gupta, Shalini
    Zaidi, Tahir
    Ferguson, Ian
    Lu, Weijie
    TENTH INTERNATIONAL CONFERENCE ON SOLID STATE LIGHTING, 2010, 7784
  • [39] Optical and transport properties of InSb thin films grown on GaAs by metalorganic chemical vapor deposition
    Yang, TR
    Cheng, YK
    Wang, JB
    Feng, ZC
    THIN SOLID FILMS, 2006, 498 (1-2) : 158 - 162
  • [40] Structural and optical properties of GaN materials grown on Si by metalorganic chemical vapor deposition
    Chen, JL
    Feng, ZC
    Zhang, X
    Chua, SJ
    Hou, YT
    Lin, J
    PHOTONICS TECHNOLOGY INTO THE 21ST CENTURY: SEMICONDUCTORS, MICROSTRUCTURES, AND NANOSTRUCTURES, 1999, 3899 : 54 - 62