Structural and electrical properties of GaSb, AlGaSb and their heterostructures grown on GaAs by metalorganic chemical vapor deposition

被引:6
|
作者
Wang, PY [1 ]
Chen, JF [1 ]
Chen, WK [1 ]
机构
[1] NATL CHAIO TUNG UNIV,DEPT ELECTROPHYS,HSINCHU,TAIWAN
关键词
D O I
10.1016/0022-0248(95)00914-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A systematic study of structural and electrical properties of GaSb and AlGaSb grown on GaAs by metalorganic chemical vapor deposition is reported. In general, the results obtained from surface morphologies, X-ray linewidths and Hall properties are consistent with each other and indicate that the optimal growth conditions for GaSb are at 525 degrees C around V/III = 1. A highest hole mobility of 652 cm(2)/V . s at RT (3208 cm(2)/V . s at 77 K) and a lowest concentration of 2.8 x 10(16) cm(-3) (1.2 X 10(15) cm(-3) at 77 K) were obtained for GaSb grown under this optimal condition. Compared to the GaSb growth, a smaller V/III ratio is needed for the AlGaSb growth to protect the surface morphology. When Al was incorporated into GaSb growth, mobility decreased and carrier concentration increased sharply. The AlGaSb grown at 600 degrees C had a background concentration about one order of magnitude lower than the AlGaSb grown at 680 degrees C. Room-temperature current-voltage characteristics of GaSb/AlxGa1-xSb/GaSb show a rectifying feature when Al composition x is higher than 0.3, suggesting a valence-band discontinuity at the AlGaSb/GaSb interface. A leakage current much higher than the value predicted by the thermionic emission theory is observed at 77 K, presumably due to a large number of dislocations generated by the huge lattice mismatch between GaSb and GaAs.
引用
收藏
页码:241 / 249
页数:9
相关论文
共 50 条
  • [1] GASB DOTS GROWN ON GAAS SURFACE BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION
    BOZEK, R
    BABINSKI, A
    BARANOWSKI, JM
    STEPNIEWSKI, R
    KLUSEK, Z
    OLEJNICZAK, W
    STAROWIEYSKI, K
    WROBEL, J
    ACTA PHYSICA POLONICA A, 1995, 88 (05) : 974 - 976
  • [2] A strain relief mode at interface of GaSb/GaAs grown by metalorganic chemical vapor deposition
    Zhou, W.
    Tang, W.
    Lau, K. M.
    APPLIED PHYSICS LETTERS, 2011, 99 (22)
  • [3] Structural characteristics of GaSb/GaAs nanowire heterostructures grown by metal-organic chemical vapor deposition
    Guo, Y. N.
    Zou, J.
    Paladugu, M.
    Wang, H.
    Gao, Q.
    Tan, H. H.
    Jagadish, C.
    APPLIED PHYSICS LETTERS, 2006, 89 (23)
  • [4] Characteristics of misfit dislocations in the GaInP/GaAs heterostructures grown by metalorganic chemical vapor deposition
    Gong, JR
    Hou, SJ
    Tseng, SF
    JOURNAL OF CRYSTAL GROWTH, 2003, 253 (1-4) : 46 - 51
  • [5] PHOTOLUMINESCENCE CHARACTERIZATION OF INGAP/GAAS HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION
    NITTONO, T
    SUGITANI, S
    HYUGA, F
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (09) : 5387 - 5390
  • [6] Energy levels of GaSb grown by metalorganic chemical vapor deposition
    Su, Y.K.
    Chen, S.M.
    Journal of Applied Physics, 1993, 73 (12):
  • [7] RESONANT TUNNELING IN GAAS/AIAS HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    BONNEFOI, AR
    COLLINS, RT
    MCGILL, TC
    BURNHAM, RD
    PONCE, FA
    APPLIED PHYSICS LETTERS, 1985, 46 (03) : 285 - 287
  • [8] Electrical characterization of InGaP/GaAs heterointerfaccs grown by metalorganic chemical vapor deposition
    Nittono, T
    Fukai, YK
    Hyuga, F
    Maeda, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (11A): : L1288 - L1289
  • [9] Electrical properties of GaP on Si grown by metalorganic chemical vapor deposition
    Soga, T.
    Suzuki, T.
    Mori, M.
    Jiang, Z.K.
    Jimbo, T.
    Umeno, M.
    Journal of Crystal Growth, 1993, 132 (3-4): : 414 - 418
  • [10] CHARACTERIZATION OF MISMATCHED INAS-GAAS HETEROSTRUCTURES GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    YORK, PK
    KIELY, CJ
    FERNANDEZ, GE
    BAILLARGEON, JN
    COLEMAN, JJ
    JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) : 512 - 516