Optical properties of hydrothermal-method-grown ZnO crystal as EUV laser diagnostics material

被引:11
|
作者
Yamanoi, Kohei [1 ]
Shimizu, Toshihiko [1 ,5 ]
Furukawa, Yusuke [1 ]
Cadatal-Raduban, Marilou [1 ]
Nakazato, Tomoharu [1 ]
Sakai, Kohei [1 ]
Tsuboi, Mizuki [1 ]
Nishi, Ryosuke [1 ]
Sarukura, Nobuhiko [1 ,5 ]
Tanaka, Momoko [2 ]
Nishikino, Masaharu [2 ]
Yamatani, Hiroshi [2 ]
Nagashima, Keisuke [2 ]
Kimura, Toyoaki [2 ]
Fukuda, Tsuguo [3 ,4 ]
Nagasono, Mitsuru [5 ]
Togashi, Tadashi [6 ]
Higashiya, Atsushi [5 ]
Yabashi, Makina [5 ]
Ishikawa, Tetsuya [5 ]
Ohashi, Haruhiko [5 ,6 ]
Kimura, Hiroaki [5 ,6 ]
机构
[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[2] Japan Atom Energy Agcy, Adv Photon Res Ctr, Kizugawa, Kyoto 6190215, Japan
[3] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
[4] Tohoku Univ, WPI Adv Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
[5] RIKEN Spring 8, Sayo, Hyogo 6795148, Japan
[6] JSRRI Spring 8, Sayo, Hyogo 6795148, Japan
关键词
Characterization; Hydrothermal crystal growth; Oxides; LUMINESCENCE; EMISSION; GAP;
D O I
10.1016/j.jcrysgro.2012.01.008
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Photoluminescence properties of hydrothermal method-grown zinc oxide (ZnO) are evaluated in the extreme ultraviolet (EUV) region. The prominent fluorescence peak observed at 380 nm is characterized by a double exponential decay profile, where the 1.6 ns fast decay component is attributed to free excitons while the 15 ns slow decay component is assigned to trapped carriers. The response time of ZnO is improved to 70 ps by intentional iron (Fe) ion doping accomplished through the removal of the platinum lining in the growth chamber. This response time-improved ZnO will have promising applications in EUV lithography and X-ray free electron laser (XFEL) research. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:264 / 267
页数:4
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