Automatic control system of a microrobot-based microassembly station using computer vision

被引：12
|
作者：
Fatikow, S [1 ]
Buerkle, A [1 ]
Seyfried, J [1 ]
机构：
[1] Univ Karlsruhe, Inst Proc Control & Robot, D-76128 Karlsruhe, Germany
来源：
MICROROBOTICS AND MICROASSEMBLY | 1999年 / 3834卷
关键词：
flexible microrobots; vision-based robot control; microassembly; flexible desktop-station; parallel computing;
D O I：
10.1117/12.357820
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The assembly of complex microsystems consisting of several single components (i.e. hybrid microsystems) is a difficult task that is seen to be a real challenge for the robotics research community. It is necessary to conceive flexible, highly precise and fast microassembly devices and methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm(3) and with at least 5 DOF can perform various manipulations either under a light microscope or within the vacuum chamber of a scanning electron microscope. The control system of the microassembly station is described. The main attention is given to a vision-based sensor system for automatic robot control and a re-configurable parallel computer array enabling the station to work in real-time.
引用
收藏
页码：11 / 22
页数：12
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