Electron field emission from nitrogen ion implantation diamond-like carbon film

被引:5
|
作者
Ma, HZ
Zhang, L
Yao, N
Li, YJ
Zhang, BL [1 ]
Hu, HL
机构
[1] Zhengzhou Univ, Dept Phys, Zhengzhou 450052, Peoples R China
[2] Chinese Acad Sci, Anhui Opt & Fine Mech Inst, Hefei 230031, Peoples R China
[3] Zhengzhou Univ, Dept Math & Phys, Zhengzhou 450052, Peoples R China
关键词
D O I
10.1088/0256-307X/16/8/023
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The electron field emission from both diamond-like carbon(DLC) and nitrogen doped diamond-like carbon films by ion implantation,was studied. The DLC films were deposited on a molybdenum layer coated on ceramic by using pulsed laser deposition. The field emission measurements show that;the incorporation of nitrogen in DLC films can increase current density and lower the turn-on field from 9 to 4 V/mu m, which indicate that the nitrogen doped DLC films have a potential application as field emission materials for fiat panel displays.
引用
收藏
页码:608 / 609
页数:2
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