Equipment for investigation of the electronic devices with the voltage contrast technique in SEM

被引：1
|
作者：
Drzazga, W [1 ]
Klubinski, G [1 ]
Slowko, W [1 ]
机构：
[1] WROCLAW TECH UNIV,INST ELECTRON TECHNOL,PL-50370 WROCLAW,POLAND
来源：
METAL/NONMETAL MICROSYSTEMS: PHYSICS, TECHNOLOGY, AND APPLICATIONS | 1996年 / 2780卷
关键词：
scanning electron microscope; voltage contrast;
D O I：
10.1117/12.238137
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：121 / 124
页数：4
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