Equipment for investigation of the electronic devices with the voltage contrast technique in SEM

被引：1

作者：

Drzazga, W ^{[1
]}

Klubinski, G ^{[1
]}

Slowko, W ^{[1
]}

机构：

[1] WROCLAW TECH UNIV,INST ELECTRON TECHNOL,PL-50370 WROCLAW,POLAND

来源：

METAL/NONMETAL MICROSYSTEMS: PHYSICS, TECHNOLOGY, AND APPLICATIONS | 1996年 / 2780卷

关键词：

scanning electron microscope; voltage contrast;

D O I：

10.1117/12.238137

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：121 / 124

页数：4

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