A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting

被引：38
|
作者：
Fang, HB
Liu, JQ [1 ]
Xu, ZY
Dong, L
Chen, D
Cai, BC
Liu, Y
机构：
[1] Shanghai Jiao Tong Univ, Inst Micro Nano Sci & Technol, Natl Key Lab Micro Nano Fabricat, Key Lab Thim Film & Micro Fabricat,Minist Educ, Shanghai 200030, Peoples R China
[2] Honeywell Co, ACS Sensors Lab, Shanghai 201203, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2006年 / 23卷 / 03期
关键词：
Piezoelectricity;
D O I：
10.1088/0256-307X/23/3/057
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based Frame and composite cantilever. The prototype tested at resonant vibration generates 1.15 mu W of effective power to a 20.4-k Omega resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.
引用
收藏
页码：732 / 734
页数：3
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