PHASE COMPOSITION, STRUCTURE, AND MICROHARDNESS OF VACUUM ION-PLASMA COATINGS BASED ON TITANIUM AND NICKEL

被引:0
|
作者
Hasiy, O. B. [1 ]
机构
[1] Natl Forestry Engn Univ Ukraine, Lvov, Ukraine
关键词
vacuum ion-plasma coatings; phase composition; structure; microhardness; Rietveld method; March-Dollase function; PREFERRED ORIENTATION;
D O I
10.1007/s11003-016-9973-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The results of investigation of the phase composition, structure, and microhardness of vacuum ion-plasma coatings based on Ti and Ni are presented. The influence of various factors, such as the chemical composition of the reaction medium, gas pressure, voltage, substrate temperature, and the separation of a plasma flow, is analyzed. The optimal parameters of the deposition of condensates are proposed.
引用
收藏
页码:414 / 420
页数:7
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