Metal Contamination of Silicon Wafers in Diamond Wire Sawing Processes Depending on the Sawing Parameters

被引:2
|
作者
Lottspeich, Lydia [1 ]
Mueller, Petra [2 ]
Kaden, Thomas [1 ]
机构
[1] Fraunhofer Technol Ctr Semicond Mat THM, D-09599 Freiberg, Germany
[2] SolarWorld Ind GmbH, D-09599 Freiberg, Germany
关键词
D O I
10.1063/1.5049342
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Multi wire sawing of silicon ingots is still the standard process for the production of silicon wafers for solar cells. The diamond wire sawing (DWS) technique is increasingly becoming the dominant wafering technique for mono- and multicrystalline silicon bricks. In DWS a steel core wire with a coating layer of nickel is often used to fix the diamonds on the wire. Parts of the nickel coating are abraded during the wafering process and are found in the silicon kerf, may be dissolved in the cooling medium or may diffuse into the wafer surface and bulk, possibly reducing the carrier lifetime. In this contribution, the effect of different parameters during DWS processes on the metal contamination of silicon wafers and kerf is investigated. The effect of metallic impurities on the conversion efficiency of PERC solar cells is shown.
引用
收藏
页数:6
相关论文
共 50 条
  • [41] Modeling and analysis of the grit level interaction in diamond wire sawing of silicon
    Hao Wu
    Chris Yang
    Shreyes Melkote
    The International Journal of Advanced Manufacturing Technology, 2016, 84 : 907 - 913
  • [42] Diamond wire sawing aids sculpture repair
    Jennings, M
    INDUSTRIAL DIAMOND REVIEW, 1996, 56 (02): : 45 - 46
  • [43] The impact of silicon brick polishing on thin (120 μm) silicon wafer sawing yields and fracture strengths in diamond-wire sawing
    Sekhar, Halubai
    Fukuda, Tetsuo
    Tanahashi, Katsuto
    Takato, Hidetaka
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2020, 105
  • [44] The impact of silicon brick polishing on thin (120 μm) silicon wafer sawing yields and fracture strengths in diamond-wire sawing
    Sekhar, Halubai
    Fukuda, Tetsuo
    Tanahashi, Katsuto
    Takato, Hidetaka
    Materials Science in Semiconductor Processing, 2020, 105
  • [45] An Innovative Light Trapping Structure Fabrication Method on Diamond-Wire-Sawing Multi-Crystalline Silicon Wafers
    Liu, Youbo
    Zhang, Junna
    Wang, Lei
    Shen, Hao
    Chen, Jie
    Tang, Xun
    Yang, Deren
    CHEMISTRYSELECT, 2018, 3 (26): : 7561 - 7564
  • [46] Effect of slurry parameters on material removal rate in multi-wire sawing of silicon wafers: a tribological approach
    Skomedal, G.
    Ovrelid, E. J.
    Armada, S.
    Espallargas, N.
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART J-JOURNAL OF ENGINEERING TRIBOLOGY, 2011, 225 (J10) : 1023 - 1035
  • [47] Sawing trajectory and mechanism of diamond wire saw
    Liu, BC
    Zhang, ZP
    Sun, YH
    ADVANCES IN GRINDING AND ABRASIVE PROCESSES, 2004, 259-2 : 395 - 400
  • [48] Diamond wire sawing aids sculpture repair
    Industrial Diamond Review, 1996, 56 (569):
  • [49] Study on the wear of diamond beads in wire sawing
    Huang, Hui
    Xu, Xipeng
    ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II, 2006, 532-533 : 436 - +
  • [50] Diamond wire sawing speeds dam project
    Beckman, T.R., 1600, (51):