Effects of polarity and surface treatment on Ga- and N-polar bulk GaN

被引:17
|
作者
Foussekis, Michael [1 ]
Ferguson, Josephus D. [1 ]
McNamara, Joy D. [1 ]
Baski, Alison A. [1 ]
Reshchikov, Michael A. [1 ]
机构
[1] Virginia Commonwealth Univ, Dept Phys, Richmond, VA 23222 USA
来源
基金
美国国家科学基金会;
关键词
atomic force microscopy; bending; chemical mechanical polishing; defect states; gallium compounds; III-V semiconductors; photoluminescence; semiconductor growth; surface morphology; surface photovoltage; surface roughness; surface states; surface topography; surface treatment; vapour phase epitaxial growth; wide band gap semiconductors; CHEMICAL-VAPOR-DEPOSITION; ATOMIC-FORCE MICROSCOPY; MOLECULAR-BEAM EPITAXY; GALLIUM NITRIDE; HETEROSTRUCTURES; PHOTOLUMINESCENCE; CHEMISTRY; CHARGE; OXYGEN; PROBE;
D O I
10.1116/1.4751276
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effects of polarity and surface treatment on the morphological, electrical, and optical behaviors in bulk GaN have been investigated. Kelvin probe, atomic force microscopy (AFM), and photoluminescence (PL) techniques were utilized to examine a set of freestanding, bulk GaN samples, which were grown by halide vapor phase epitaxy. The Ga- and N-polar surfaces were treated with either a mechanical polish (MP) or chemical mechanical polish (CMP), which influences the morphology, surface photovoltage (SPV), and PL behaviors. Topography studies indicate that the CMP-treated, Ga-polar surface is the smoothest of the sample set, whereas the MP-treated, N-polar surface has the highest root mean square roughness. Local current-voltage spectra obtained with conducting AFM reveal a higher forward-bias, turn-on voltage for the N-polar versus Ga-polar surfaces. Using a Kelvin probe, intensity-dependent SPV measurements are performed on samples with CMP-treated, Ga- and N-polar surfaces, and provide band bending values of 0.83 and 0.70 eV, respectively. The restoration of the SPV from CMP-treated surfaces behaves as predicted by a thermionic model, whereas restoration from MP-treated surfaces has a faster rate than expected. This result is possibly due to enhanced electron conduction via hopping between defect states to the surface. The quantum efficiency of the PL from the CMP- and MP-treated surfaces at room temperature is similar to 1% and 1 x 10-5%, respectively, suggesting high quenching of the PL for MP-treated surfaces by near-surface defects. Therefore, AFM, PL, and SPV data indicate that the MP-treated surfaces have a significantly higher density of surface defects.
引用
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页数:10
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