From 2-Dimensional Lithography To 3-Dimensional Structures

被引：1
|
作者：
van Zeijl, H. W. [1 ]
Wei, J. [1 ]
Shen, C. [1 ]
Verhaar, T. M. [1 ]
Maury, P. [2 ]
Sarro, P. M. [1 ]
机构：
[1] Delft Univ Technol, DIMES, Delft, Netherlands
[2] ASML, NL-5504 Delft, Netherlands
来源：
CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2010 (CSTIC 2010) | 2010年 / 27卷 / 01期
关键词：
D O I：
10.1149/1.3360654
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Lithography for IC device fabrication is a high volume high accuracy production technology. Such production characteristics are also attractive for MEMS and 3 dimensional (3D) integration processes. However, advanced lithography has a strong 2 dimensional (2D) nature and is not optimized to fabricate 3D structures. In this work, 5 exposure and etch strategies are discussed to use advanced 2D lithography to fabricate 3D structures.
引用
收藏
页码：421 / 426
页数：6
相关论文
共 50 条
  • [31] 2-DIMENSIONAL CRYSTALLIZATION OF PROTEINS AND 3-DIMENSIONAL RECONSTRUCTION OF PROTEIN STRUCTURES BY ELECTRON MICROGRAPHY
    NAGAYAMA, K
    YOSHIMURA, H
    ENDO, S
    KULKARNI, V
    MATSUMOTO, M
    JOURNAL OF ELECTRON MICROSCOPY, 1990, 39 (04): : 316 - 316
  • [32] 3-DIMENSIONAL FLOW PATTERNS IN 2-DIMENSIONAL WAKES
    TRIANTAFYLLOU, GS
    JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME, 1992, 114 (03): : 356 - 361
  • [33] VORTICAL SCALES FOR 2-DIMENSIONAL AND 3-DIMENSIONAL TURBULENCE
    NOVIKOV, EA
    PHYSICAL REVIEW E, 1994, 49 (02): : R975 - R977
  • [34] COMPARISON OF 2-DIMENSIONAL AND 3-DIMENSIONAL BEACH PROFILES
    KAMPHUIS, JW
    JOURNAL OF WATERWAY PORT COASTAL AND OCEAN ENGINEERING-ASCE, 1995, 121 (03): : 155 - 161
  • [35] DISCRETE MODELS FOR 2-DIMENSIONAL AND 3-DIMENSIONAL FRAGMENTATION
    HERNANDEZ, G
    HERRMANN, HJ
    PHYSICA A, 1995, 215 (04): : 420 - 430
  • [36] JOINTS IN 2-DIMENSIONAL AND 3-DIMENSIONAL RECTANGULAR DISSECTIONS
    EARL, CF
    ENVIRONMENT AND PLANNING B-PLANNING & DESIGN, 1978, 5 (02): : 179 - 187
  • [37] INFANT RECOGNITION OF 2-DIMENSIONAL AND 3-DIMENSIONAL STIMULI
    RUFF, HA
    KOHLER, CJ
    HAUPT, DL
    DEVELOPMENTAL PSYCHOLOGY, 1976, 12 (05) : 455 - 459
  • [38] VISCOUS VORTICES IN 2-DIMENSIONAL AND 3-DIMENSIONAL SPACE
    TING, L
    BAUER, F
    COMPUTERS & FLUIDS, 1993, 22 (4-5) : 565 - 588
  • [39] USING OF 2-DIMENSIONAL SOLUTION IN 3-DIMENSIONAL PROBLEMS
    VESNIK, MV
    RADIOTEKHNIKA I ELEKTRONIKA, 1993, 38 (08): : 1416 - 1423
  • [40] 2-DIMENSIONAL AND 3-DIMENSIONAL BUOYANT THERMOCAPILLARY CONVECTION
    MUNDRANE, M
    ZEBIB, A
    PHYSICS OF FLUIDS A-FLUID DYNAMICS, 1993, 5 (04): : 810 - 818
12345