Fabrication-Tolerant Higher Order Laterally-Coupled Distributed Feedback Lasers

被引：3
|
作者：
Millett, R. [1 ]
Hinzer, K. [1 ]
Hall, T. [1 ]
Schriemer, H. [1 ]
机构：
[1] Univ Ottawa, Ctr Res Photon, Ottawa, ON K1N 6N5, Canada
来源：
PHOTONICS NORTH 2008 | 2008年 / 7099卷
关键词：
coupled-mode theory; distributed feedback lasers; higher order gratings;
D O I：
10.1117/12.807411
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
To avoid the commonly required regrowth steps in conventional distributed feedback laser fabrication, laterally-coupled distributed feedback (LC-DFB) lasers lithographically pattern the grating out of the ridge waveguide. Using higher order gratings increases the lithographic tolerances, resulting in lasers that are more amenable to mass-manufacturing techniques, such as stepper lithography. We have extended the modified coupled-mode theory to a two-dimensional cross-section, and thereby identified grating geometries that are both fabrication-tolerant and provide high performance.
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页数：12
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