Design and Fabrication of Micromachined LPD-based SnO2 Gas Sensor Integrated TaN with Micro-hotplate

被引：0

作者：

Chiou, Jin-Chern ^{[1
,2
]}

Lin, Chia-Yang ^{[1
]}

Tsai, Shang-Wei ^{[1
]}

Hong, Wei-Che ^{[1
]}

Chiou, Jin-Chern ^{[1
,2
]}

机构：

[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan

[2] China Med Univ Taichung, Sch Med, Taichung 40402, Taiwan

来源：

2012 IEEE SENSORS PROCEEDINGS | 2012年

关键词：

THIN-FILMS; DEPOSITION;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, the design and fabrication of a micromachined LPD-based SnO2 gas sensor integrated with TaN micro-hotplate was carried out by utilizing MEMS technology. In the characteristics of the micro-heater, thermal response, thermal distribution and power consumption of heated TaN micro-heater were measured by FLIR systems. For the sensing characterization, the sensing responses of LPD-based SnO2 gas sensor with TaN micro-heater to H2S gas were measured in different operating temperatures. In sensing properties, the resistances of the gas sensor significantly change in the staircase concentration of H2S gas and which optimal operating temperature was 250 degrees C.

引用

页码：1144 / 1147

页数：4

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