A TCAD simulation tool for inductively coupled plasmas and experimental validation

A two-dimensional, self-consistent, fluid simulation of plasma transport and chemistry in inductively coupled plasma reactors is developed. The simulation incorporates certain features that allow rapid computation (similar to 1 hr on a desktop workstation) of even electronegative plasmas. A user-friendly interface facilitates analysis of complex geometries and/or chemistries. These features are incorporated into a Technology Computer-Aided Design (TCAD) tool, named Modular Plasma Reactor Simulator (MPRES). MPRES predictions compare favorably with experimental data in electropositive (Ar) as well as electronegative (Cl-2) plasmas without fitting any parameters or rate coefficients. An example application is made to compare the uniformity of ion and neutral flux striking the wafer for different reactor dimensions.