Quantum Cascade Laser Based Photoacoustic Spectroscopy for Depth Profiling Investigations of Condensed-Phase Materials

被引：8
|
作者：
Holthoff, Ellen L. [1 ]
Marcus, Logan S. [2 ]
Pellegrino, Paul M. [1 ]
机构：
[1] USA, Res Lab, RDRL SEE E, 2800 Powder Mill Rd, Adelphi, MD 20783 USA
[2] Univ Mississippi, Natl Ctr Phys Acoust, University, MS 38677 USA
来源：
APPLIED SPECTROSCOPY | 2012年 / 66卷 / 09期
关键词：
Photoacoustic spectroscopy; Condensed phase; Depth profiling; Quantum cascade laser; OPTOACOUSTIC SPECTROSCOPY; LIQUIDS; SENSOR;
D O I：
10.1366/12-06655a
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We report on the development of a photoacoustic device for the detection of condensed-phase materials. A mid-infrared quantum cascade laser (QCL) was used for depth-profiling studies to distinguish among glycerol films and tetraethoxysilane (TEOS) films deposited on photoresist-coated silicon wafers. The QCL was continuously tunable from 1015 cm(-1) to 1240 cm(-1), allowing for collection of photoacoustic vibrational spectra for these materials. Variation of the laser pulse repetition rate allowed for identification and molecular discrimination of glycerol, TEOS, and photoresist based solely on photoacoustic spectra collected at different film depths.
引用
收藏
页码：987 / 992
页数：6
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