Fabrication of refractive microlens with coding gray-tone mask

被引：0
|
作者：
Yao, J [1 ]
Su, JQ [1 ]
Zhang, YX [1 ]
Gao, FH [1 ]
Wei, H [1 ]
Guo, YK [1 ]
机构：
[1] Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China
来源：
18TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR THE NEXT MILLENNIUM, TECHNICAL DIGEST | 1999年 / 3749卷
关键词：
coding gray-tone mask; micro optical elements; microlens;
D O I：
10.1117/12.354999
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The fabrication of refractive microlens by introducing the melting process with coding gray-tone mask is reported. The applied mask is obtained by the coding method, nonlinear effects in intensity distribution through the gray-tone mask have been taken into account to correct the mask design. A continuous relief is formed in photoresist after exposing, and then the excellent surface shape microlens can be gained by melting. The technical parameters of this process are also presented. Results are presented for experiments and evaluated by profile meter and scanning electronic microscope. The fabrication technology of refractive microlens by this process is simple and it indicates the enormous potential to extend the fabrication range of refractive microlens.
引用
收藏
页码：760 / 761
页数：2
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