Methods for Computer Simulation of Crystal Sputtering

被引：0
|
作者：
Zykova, E. Yu. [1 ]
Mosunov, A. S. [1 ]
Yurasova, V. E. [1 ]
机构：
[1] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119992, Russia
来源：
COMPUTATIONAL MATHEMATICS AND MATHEMATICAL PHYSICS | 2008年 / 48卷 / 10期
基金：
俄罗斯基础研究基金会;
关键词：
computer simulation; crystal sputtering; molecular dynamics methods; single crystals; polycrystals;
D O I：
10.1134/S0965542508100126
中图分类号：
O29 [应用数学];
学科分类号：
070104 ;
摘要：
A computer program for molecular dynamics simulation of sputtering is developed. Numerical methods for the integration of the equations of motion are described. Algorithms for constructing models of single- and polycrystalline targets are proposed. The applicability of various ion-atom and atom-atom interaction potentials to sputtering computations is analyzed.
引用
收藏
页码：1904 / 1914
页数：11
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