Nanometer-scale dimensional metrology with noncontact atomic force microscopy

被引：3
|
作者：
Marchman, H [1 ]
机构：
[1] TEXAS INSTRUMENTS INC,CTR SEMICOND PROC & DESIGN,DALLAS,TX 75243
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X | 1996年 / 2725卷
关键词：
D O I：
10.1117/12.240110
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：527 / 539
页数：13
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