NanoMi: An open source electron microscope hardware and software platform

被引：3

作者：

Malac, Marek ^{[1
,2
]}

Calzada, Jesus Alejandro Marin ^{[2
]}

Salomons, Mark ^{[1
]}

Homeniuk, Darren ^{[1
]}

Price, Patrick ^{[1
]}

Cloutier, Martin ^{[1
]}

Hayashida, Misa ^{[1
]}

Vick, Doug ^{[1
]}

Chen, Sean ^{[3
]}

Yakubu, Suliat ^{[4
]}

Wen, Zhengxu ^{[5
]}

Leeson, Marcus ^{[6
]}

Kamal, Mohammad ^{[7
]}

Pitters, Jason ^{[1
]}

Kim, John ^{[8
]}

Wang, Xuanhao ^{[9
]}

Adkin-Kaya, Olivier ^{[7
]}

Egerton, Ray ^{[2
]}

机构：

[1] CNR, NRC NANO, Edmonton, AB T6G 2M9, Canada

[2] Univ Alberta, Dept Phys, Edmonton, AB T6G 2E1, Canada

[3] Univ British Columbia, Dept Phys & Astron, 6224 Agr Rd, Vancouver, BC V6T 1Z1, Canada

[4] Univ British Columbia, Sch Biomed Engn, 2335 Engn Rd X015, Vancouver, BC V6T 1Z4, Canada

[5] Univ British Columbia, Integrated Engn Program, 6350 Stores Rd, Vancouver, BC V6T 1Z4, Canada

[6] Univ British Columbia, Fac Mech Engn, 6250 Appl Sci Lane, Vancouver, BC, Canada

[7] Univ Alberta, Dept Elect & Comp Engn, 9211 116 St NW, Edmonton, AB T6G 1H9, Canada

[8] Univ British Columbia, Dept Elect & Comp Engn, 5500-2332 Main Mall, Vancouver, BC V6T 1Z4, Canada

[9] Univ Alberta, Dept Comp Sci, 8900 114 St NW, Edmonton, AB T6G 2S4, Canada

来源：

MICRON | 2022年 / 163卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

Transmission electron microscope (TEM); Scanning Electron Microscope (SEM); Scanning Transmission Electron Microscope  (STEM); ED; Public license electron microscope; Open science; Microscopy education; FLASHOVER; VACUUM; ABERRATIONS;

D O I：

10.1016/j.micron.2022.103362

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We outline a public license (open source) electron microscopy platform, referred to as NanoMi. NanoMi offers a modular, flexible electron microscope platform that can be utilized for a variety of applications, such as mi-croscopy education and development of proof-of-principle experiments, and can be used to complement an existing experimental apparatus. All components are ultra-high vacuum compatible and the electron optics el-ements are independent from the vacuum envelope. The individual optical components are mounted on a 127 mm (5-inch) diameter half-pipe, allowing customizing of electron optics for a variety of purposes. The target capabilities include SEM, TEM, scanning TEM (STEM), and electron diffraction (ED) at up to 50 keV incident electron energy. The intended image resolution in SEM, TEM and STEM modes is approximate to 10 nm. We describe the existing components and the interfaces among components that ensure their compatibility and interchange-ability. The paper provides a resource for those who consider building or utilizing their own NanoMi.

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页数：25

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