K0.5Na0.5NbO3 Thin Films Prepared by Chemical Solution Deposition

The thin films of potassium sodium niobate (K0.5Na0.5)NbO3 on Pt(111)/TiO2/SiO2/Si substrates have been prepared by chemical solution deposition. The stoichiometric sols were synthesized from corresponding alkali metal ethoxides or acetates and niobium ethoxide in 2-methoxyethanol. The thin film quality is affected by choice of alkali metal precursors. Thin films prepared from the acetate-based sol upon heating to 670C crystallize in pure perovskite phase. The dielectric permittivity of the 350 nm thick KNN film at 10 kHz is 533 and the dielectric loss factor is 0.068.