C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

被引：1

作者：

Nakahigashi, Yuta ^{[1
]}

Yanagitani, Takahiko ^{[2
]}

Matsukawa, Mami ^{[1
]}

Yoshiaki, Watanabe ^{[1
]}

机构：

[1] Doshisha Univ, Fac Engn, 1-3 Tatara Miyakodani, Kyoto 6100321, Japan

[2] Nagoya Inst Technol, Nagoya, Aichi 4668555, Japan

来源：

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2011年

关键词：

c-axis parallel oriented ZnO film; SH-SAW; sensor;

D O I：

10.1109/ULTSYM.2011.0198

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K-2 value in IDT / ZnO (0 degrees, 90 degrees, Psi) film / silica glass substrate structure showed that maximum value of K-2 = 3.4 % was found at Psi = 55 degrees with H / lambda = 0.21. In this study, we fabricated these structures and evaluated K-2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

引用

页码：810 / 813

页数：4

共 38 条

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