C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

被引：1
|
作者：
Nakahigashi, Yuta [1 ]
Yanagitani, Takahiko [2 ]
Matsukawa, Mami [1 ]
Yoshiaki, Watanabe [1 ]
机构：
[1] Doshisha Univ, Fac Engn, 1-3 Tatara Miyakodani, Kyoto 6100321, Japan
[2] Nagoya Inst Technol, Nagoya, Aichi 4668555, Japan
来源：
2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2011年
关键词：
c-axis parallel oriented ZnO film; SH-SAW; sensor;
D O I：
10.1109/ULTSYM.2011.0198
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K-2 value in IDT / ZnO (0 degrees, 90 degrees, Psi) film / silica glass substrate structure showed that maximum value of K-2 = 3.4 % was found at Psi = 55 degrees with H / lambda = 0.21. In this study, we fabricated these structures and evaluated K-2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.
引用
收藏
页码：810 / 813
页数：4
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