Effect of laser power on electrical conductivity of BaTi5O11 films prepared by laser chemical vapor deposition method

BaTi5O11 films were prepared on Pt/Ti/SiO2/Si substrates by a laser chemical vapor deposition method. The effect of laser power (P (L)) on the electrical conductivity of the BaTi5O11 films was investigated. The electrical resistivity of the grains was much higher than that of the grain boundaries, which indicated that the electrical conductivity along the grain boundary was dominant. For the BaTi5O11 films, the conduction was mainly attributed to oxygen vacancies, and the electrical conductivity was strongly affected by their microstructures and the concentration of the charge carriers. With increasing the P (L), the grain size increased and the grain-boundary density decreased, which resulted in the decrease of the electrical conductivity. At the same time, the increase of T (dep) led to higher concentration of charge carriers, which resulted in the increase of electrical conductivity.