Growth of Metal-Free Carbon Nanotubes with an Amorphous Carbon Catalyst Layer

被引：1
|
作者：
Song, Woochang [1 ]
Lim, Dong-Gun [1 ]
Kim, Hee Dong [2 ]
Lee, Jae-Hyeoung [3 ]
Cha, Jaesang [4 ]
Park, Gooman [4 ]
Choi, Eun Chang [5 ]
Hwang, Hyun Suk [5 ]
Cho, Hyung Jun [5 ]
Hong, Byungyou [5 ]
Choi, Won Seok [6 ]
机构：
[1] Chungju Natl Univ, Res Inst BINT New Technol, Chungju 380702, South Korea
[2] KEPCO Korea Elect Power Res Inst, Taejon 305380, South Korea
[3] Kunsan Natl Univ, Sch Elect & Informat Engn, Kunsan 573701, South Korea
[4] Seoul Natl Univ Technol, Dept Media Engn, Seoul 139743, South Korea
[5] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 440746, South Korea
[6] Hanbat Natl Univ, Dept Elect Engn, Taejon 305719, South Korea
来源：
JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2008年 / 53卷 / 04期
关键词：
Carbon nanotube (CNT); Amorphous carbon; Catalyst; Closed-field unbalanced magnetron (CFUBM); Microwave plasma-enhanced chemical-vapor deposition (MPECVD);
D O I：
10.3938/jkps.53.2142
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
An amorphous carbon (a-C) thin film was used as a catalyst, layer to grow metal-free carbon nanotubes (CNTs). The a-C films were deposited with a closed-field unbalanced magnetron (CFUBM) sputtering method on Si substrates. The CNTs were prepared using a microwave plasma-enhanced chemical-vapor deposition (MPECVD) method with an a-C catalyst film coated onto a silicon substrate by using methane (CH4) and hydrogen (H-2) gas. The CNTs were grown at different temperatures (550 degrees C, 650 degrees C and 750 degrees C) with other conditions being held constant. Field emission scanning electron microscopy (FE-SEM) images showed growth trend of the CNTs against temperature. High-resolution transmission electron microscopy (HR-TEM) images showed the CNTs to be multi-walled. Energy dispersive spectroscopy (EDS) measurements confirmed that the CNTs consisted solely of carbon.
引用
收藏
页码：2142 / 2146
页数：5
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