On the elastic modulus and hardness of co-sputtered Zr-Cu-(N) thin metal glass films

被引：32

作者：

Coddet, P. ^{[1
]}

Sanchette, F. ^{[1
]}

Rousset, J. C. ^{[2
]}

Rapaud, O. ^{[1
]}

Coddet, C. ^{[1
]}

机构：

[1] LERMPS UTBM, F-90010 Belfort, France

[2] TAG HEUER, CH-2300 La Chaux De Fonds, Switzerland

来源：

SURFACE & COATINGS TECHNOLOGY | 2012年 / 206卷 / 17期

关键词：

Thin Film Metallic Glasses (TFMG); Amorphous alloys; Co-sputtering; Hardness; Young's modulus; Nanoindentation; ZR-NI; CU;

D O I：

10.1016/j.surfcoat.2012.02.036

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This work focuses on the properties of Zr-Cu-(N) deposits obtained by magnetron co-sputtering of Zr and Cu targets in pure argon or in argon nitrogen gas mixtures. Microstructure and mechanical properties (hardness and Young's modulus) were investigated versus deposition parameters. The composition of the Zr-Cu alloy films on the full binary range was accurately controlled by means of the discharge current intensity on both Zr and Cu targets. Deposits were observed to be amorphous single phased in a large range of copper content, the hardness and Young's modulus of the amorphous phase increasing with the latter. A small amount of nitrogen in the gas mixture leads to higher hardness and Young's modulus values. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：3567 / 3571

页数：5

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