A study of degradation of indium tin oxide thin films on glass for display applications

被引：24
|
作者：
Leung, W. S. [1 ]
Chan, Y. C. [1 ]
Lui, S. M. [2 ]
机构：
[1] City Univ Hong Kong, Dept Elect Engn, Kowloon Tong, Hong Kong, Peoples R China
[2] Varitronix Grp, Kowloon, Hong Kong, Peoples R China
来源：
MICROELECTRONIC ENGINEERING | 2013年 / 101卷
关键词：
ITO corrosion; ITO degradation; Scratching; Accelerated degradation test; ITO;
D O I：
10.1016/j.mee.2012.08.002
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Indium tin oxide (ITO) has been widely used in liquid crystal displays (LCD). Contamination and moisture have proved to have the adverse effect of causing ITO corrosion/degradation. The purpose of this paper is to determine if scratching the surface of ITO is a cause of ITO degradation. Additionally, the influence of the width of ITO tracks on degradation was observed under accelerated testing. Simultaneously, anisotropic conductive adhesive film (ACF) was added to the ITO surface, to determine any adverse degradation effect. It was determined that the time to initiate corrosion was faster if the ITO was scratched, and that the degradation was directly related to the surface area of the ITO electrodes. (C) 2012 Elsevier B.V. All rights reserved.
引用
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页码：1 / 7
页数：7
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