SIRIUS: A new beamline for in situ X-ray diffraction and spectroscopy studies of advanced materials and nanostructures at the SOLEIL Synchrotron

被引:32
|
作者
Ciatto, G. [1 ]
Chu, M. H. [1 ]
Fontaine, P. [1 ]
Aubert, N. [1 ]
Renevier, H. [2 ]
Deschanvres, J. L. [2 ]
机构
[1] Synchrotron SOLEIL, BP48, F-91192 Gif Sur Yvette, France
[2] Grenoble INP MINATEC, Mat & Genie Phys Lab, 3 Parvis L Neel, F-38016 Grenoble, France
关键词
In situ; Synchrotron; X-ray diffraction; X-ray spectroscopy; TIME;
D O I
10.1016/j.tsf.2016.03.069
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a new beamline of Synchrotron SOLEIL dedicated to the study of thin films, nanostructures, and advanced materials via X-ray diffraction and spectroscopy in the energy range 1.4-12 key. This range covers most of the absorption edges of interest in the fields of semiconductors and functional oxides. In order to meet the increasing demand of advanced real-time characterization of nanoscale materials, the beamline optics and instrumentation have been designed with remarkable dynamic characteristics. SIRIUS presently ends in two experimental stations used for in situ X-ray characterization: a baby chamber and a chemical reactor, both mounted on a large seven-circle diffractometer. The rector is dedicated to atomic layer deposition and metal organic chemical vapor deposition of oxide materials. The third end-station, an in-vacuum diffractometer, will be operative by the end of 2016. SIRIUS offers several synchrotron radiation techniques which can be performed simultaneously or quasi-simultaneously on the same sample. We show here some examples of the first in situ results obtained at the beamline. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:48 / 54
页数:7
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