Deep-Ultraviolet Light Detection of p-Type Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films

被引：29
|
作者：
Ohmagari, Shinya [1 ]
Yoshitake, Tsuyoshi [1 ]
机构：
[1] Kyushu Univ, Dept Appl Sci Elect & Mat, Kasuga, Fukuoka 8168580, Japan
来源：
APPLIED PHYSICS EXPRESS | 2012年 / 5卷 / 06期
基金：
日本学术振兴会; 日本科学技术振兴机构;
关键词：
DIAMOND; ABSORPTION;
D O I：
10.1143/APEX.5.065202
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Deep-ultraviolet (DUV) light detection of p-type ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films prepared by pulsed laser deposition was investigated. The photocurrent spectra revealed that the UNCD/a-C:H films possess strong responses in the wavelength range between 210 and 280 nm, which might originate from UNCD grains. The heterojunction photodiodes comprised of p-type UNCD/a-C: H and n-type Si exhibited an obvious photovoltaic action for 254 nm DUV light illumination. The external quantum efficiency and responsivity of the photodiodes were estimated to be 71% and 130 mA/W, respectively. It was proved that UNCD/a-C: H is a new promising material applicable to DUV photodetectors. (C) 2012 The Japan Society of Applied Physics
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页数：3
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