Deep-Ultraviolet Light Detection of p-Type Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films

被引：29

作者：

Ohmagari, Shinya ^{[1
]}

Yoshitake, Tsuyoshi ^{[1
]}

机构：

[1] Kyushu Univ, Dept Appl Sci Elect & Mat, Kasuga, Fukuoka 8168580, Japan

来源：

APPLIED PHYSICS EXPRESS | 2012年 / 5卷 / 06期

基金：

日本学术振兴会; 日本科学技术振兴机构;

关键词：

DIAMOND; ABSORPTION;

D O I：

10.1143/APEX.5.065202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Deep-ultraviolet (DUV) light detection of p-type ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films prepared by pulsed laser deposition was investigated. The photocurrent spectra revealed that the UNCD/a-C:H films possess strong responses in the wavelength range between 210 and 280 nm, which might originate from UNCD grains. The heterojunction photodiodes comprised of p-type UNCD/a-C: H and n-type Si exhibited an obvious photovoltaic action for 254 nm DUV light illumination. The external quantum efficiency and responsivity of the photodiodes were estimated to be 71% and 130 mA/W, respectively. It was proved that UNCD/a-C: H is a new promising material applicable to DUV photodetectors. (C) 2012 The Japan Society of Applied Physics

引用

页数：3

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