Estimation of thermo-elastic damping of vibrations in micro-electro-mechanical systems resonators: finite element modeling

被引：2
|
作者：
Kausinis, Saulius [1 ]
Yee, Karl [2 ]
Barauskas, Rimantas [3 ]
机构：
[1] Kaunas Univ Technol, Dept Engn Mech, LT-44029 Kaunas, Lithuania
[2] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA
[3] Kaunas Univ Technol, Dept Syst Anal, LT-51368 Kaunas, Lithuania
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2012年 / 11卷 / 03期
关键词：
MEMS vibrations; thermo-elastic dissipation; quality factor; finite element modeling; INTERNAL-FRICTION; MEMS;
D O I：
10.1117/1.JMM.11.3.033005
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The authors investigated finite element (FE) analysis of damped modal vibrations in complex geometries of micro-electromechanical (MEM) resonators. Q-factor values were determined by taking the thermo-elastic damping into account. The basic model created is presented as a system of partial differential equations, which describe the elastic and thermal phenomena in the MEM structure. Mathematically the problem is formulated as a complex eigenvalue problem. Modal properties of square-and ring-shaped bulk-mode MEM resonators were investigated by taking into account the layered structure of the MEM system and the influence of the geometry of the clamping zone. The calculations were performed by employing the COMSOL Multiphysics FE software. The solution method was verified by comparing numerically and analytically obtained damped modal properties of a MEM cantilever resonator. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.JMM.11.3.033005]
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页数：11
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