Gas-sensing properties of thermally-oxidized metal oxide nanowires

被引：6
|
作者：
Zappa, Dario [1 ]
Comini, Elisabetta [1 ]
Sberveglieri, Giorgio [1 ]
机构：
[1] Univ Brescia, Sensor Lab, I-25133 Brescia, Italy
来源：
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | 2012年 / 47卷
关键词：
Metal oxides; Chemical sensing; Nanowires; FIELD-EMISSION; SENSORS; HUMIDITY; CO;
D O I：
10.1016/j.proeng.2012.09.176
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study metal oxide nanowires were grown by thermal oxidation of metallic thin layer deposited by sputtering on alumina and silicon substrates. Both n-type (ZnO) and p-type (CuO) nanowires were grown. Mat-based conductometric chemical sensing devices were successfully prepared, and their sensing response was evaluated towards different chemical species, in order to highlight the electrical properties of the materials. Calibration curves for the detection of some target gases were estimated. (C) 2012 Elsevier Ltd.... Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.
引用
收藏
页码：430 / 433
页数：4
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