Formation of a p-n junction and electrode in silicon con carbide at room temperature using a pulsed laser doping method

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作者
Eryu, O [1 ]
Nakashima, K [1 ]
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[1] NAGOYA INST TECHNOL,DEPT ELECT & COMP ENGN,SHOWA KU,NAGOYA,AICHI 466,JAPAN
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TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:141 / 146
页数:6
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