Improvement of tribological behavior in thin hard coatings by chlorine ion implantation

被引：0
|
作者：
Aizawa, T [1 ]
Mitsuo, A [1 ]
机构：
[1] Univ Tokyo, Tokyo, Japan
来源：
HEAT TREATING, VOLS 1 AND 2, PROCEEDINGS | 2000年
关键词：
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中图分类号：
O414.1 [热力学];
学科分类号：
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页码：366 / 372
页数：3
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