CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide

被引：11
|
作者：
Loh, Ter-Hoe [1 ]
Wang, Qian [1 ]
Ng, Keh-Ting [1 ]
Lai, Yi-Cheng [1 ]
Ho, Seng-Tiong [2 ]
机构：
[1] Data Storage Inst, Singapore 117608, Singapore
[2] Northwestern Univ, Dept Elect Engn & Comp Sci, Evanston, IL 60208 USA
来源：
OPTICS EXPRESS | 2012年 / 20卷 / 14期
关键词：
COUPLER; FIBER;
D O I：
10.1364/OE.20.014769
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a CMOS compatible mass manufacturable, compact Si/SiO2 multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-thick Si waveguide. The fiber-to-GRIN lens coupling loss is 2.6 +/- 0.3dB (coupling efficiency: 51 similar to 60%) with optimized focal length of 11.6 similar to 11.8 mu m and Si/SiO2 multilayer thickness of 7.4 mu m. (c) 2012 Optical Society of America
引用
收藏
页码：14769 / 14778
页数：10
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