共 50 条
- [1] Comparative study of gate oxide in 4H-SiC lateral MOSFETs subjected to post-deposition-annealing in N2O and POCl3 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2014, 115 (01): : 333 - 339
- [2] Comparative study of gate oxide in 4H-SiC lateral MOSFETs subjected to post-deposition-annealing in N2O and POCl3 Applied Physics A, 2014, 115 : 333 - 339
- [3] SiO2/4H-SiC interface states reduction by POCl3 post-oxidation annealing 2015 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS), 2015, : 255 - 258
- [6] Characterization of SiO2/SiC interfaces annealed in N2O or POCl3 SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2, 2014, 778-780 : 623 - +
- [7] N2O processing improves the 4H-SiC:SiO2 interface SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS, 2002, 389-3 : 985 - 988
- [9] A look underneath the SiO2/4H-SiC interface after N2O thermal treatments BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2013, 4 : 249 - 254
- [10] Improved dielectric and interface properties of 4H-SiC MOS structures processed by oxide deposition and N2O annealing SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2, 2006, 527-529 : 987 - 990