Mo/Ti multilayer Bragg reflector for LiNbO3 film bulk acoustic wave resonators

被引：23

作者：

Bai, Xiaoyuan ^{[1
]}

Shuai, Yao ^{[1
]}

Lv, Lu ^{[1
]}

Huang, Shitian ^{[1
]}

Xing, Ying ^{[1
]}

Zhao, Jiaoling ^{[2
]}

Luo, Wenbo ^{[1
]}

Wu, Chuangui ^{[1
]}

Yang, Tao ^{[3
]}

Zhang, Wanli ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 611731, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

[3] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 611731, Peoples R China

来源：

JOURNAL OF APPLIED PHYSICS | 2020年 / 128卷 / 09期

基金：

中国国家自然科学基金;

关键词：

THIN-FILMS; FBAR;

D O I：

10.1063/5.0011954

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A 43 degrees rotated Y-cut LiNbO3 (LN) single-crystal thin film coated with a bottom electrode and a Mo/Ti Bragg reflector is successfully transferred onto the 4-in. LN wafer substrate by means of crystal-ion-slicing (CIS) technique and benzocyclobutene bonding method. The multilayer film is crack-free, and the Mo/Ti reflector shows good acoustic reflection efficiency. A thin film bulk acoustic wave resonator based on the Mo/Ti Bragg reflector and the LN thin film (LN-BAW) is prepared, and the properties are further analyzed. The results indicate that the LN-BAW provides a large K-t(2) of similar to 16.63% and the Q-factor and figure-of-merit of the LN-BAW reach 183 and 30.4, respectively.

引用

页数：5

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