Effect of substrate temperature deposition on the 1/f noise of Al-doped ZnO thin films

被引：0
|
作者：
Barhoumi, A. [1 ]
Yang, L. [2 ]
Leroy, G. [2 ]
Gest, J. [2 ]
Carru, J. -C. [2 ]
Guermazi, S. [1 ]
机构：
[1] Univ Sfax, Unite Rech Phys Mat Isolants & Semiisolants, IPEIS, Sfax, Tunisia
[2] Univ Lille Nord France, ULCO, UDSMM, F-62228 Calais, France
来源：
2013 22ND INTERNATIONAL CONFERENCE ON NOISE AND FLUCTUATIONS (ICNF) | 2013年
关键词：
AZO; thin films; DC sputtering; 1/f noise; ZINC-OXIDE FILMS; ELECTRICAL-PROPERTIES; TRANSPARENT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have investigated the low-frequency noise and the sheet resistance of Al-doped ZnO thin films deposited by DC sputtering technique on glass substrate at different temperature. We characterized the noise below 100 kHz and obtained 1/f spectra. The 1/f noise normalized for bias, frequency and unit area, C-us is proportional with the sheet resistance R-sh. Sheet resistance decreases with the increasing of the substrate temperature T-s. The decrease of the normalized noise showed the improvement of the crystallinity and homogeneity of AZO thin films with T-s which indicates the sensitivity of the noise with the crystalline quality of the thin films
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Transparent conductive Al-doped ZnO thin films grown at room temperature
    Wang, Yuping
    Lu, Jianguo
    Bie, Xun
    Gong, Li
    Li, Xiang
    Song, Da
    Zhao, Xuyang
    Ye, Wenyi
    Ye, Zhizhen
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (03):
  • [32] Effect of growth temperature on the properties of hydrogenated Al-doped ZnO films
    Tark, Sung Ju
    Kang, Min Gu
    Lim, Hee-Jin
    Kim, Donghwan
    Lee, Seung Hoon
    Kim, Won Mok
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (01) : 282 - 287
  • [33] Effect of Growth Temperature on the Properties of Hydrogenation Al-doped ZnO Films
    Tark, Sung Ju
    Kang, Min Gu
    Lee, Seung Hoon
    Kim, Won Mok
    Lim, Hee-Jin
    Kim, Donghwan
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2007, 17 (12): : 629 - 633
  • [34] Transparent conducting Al-doped ZnO thin films prepared by pulsed laser deposition
    Suzuki, A
    Matsushita, T
    Wada, N
    Sakamoto, Y
    Okuda, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (1A): : L56 - L59
  • [35] Electrostatic Spray Deposition of Al-Doped ZnO Thin Films for Acetone Gas Detection
    Lee, Geonhui
    Sim, Jae-Ho
    Oh, Gyeongseok
    Won, Mijin
    Mantry, Snigdha Paramita
    Kim, Dong-Soo
    PROCESSES, 2023, 11 (12)
  • [36] Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cells
    Martinez, MA
    Herrero, J
    Gutierrez, MT
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 45 (01) : 75 - 86
  • [37] Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition
    Wu, Yong
    Cao, Fa
    Ji, Xiaohong
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2020, 31 (20) : 17365 - 17374
  • [38] Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition
    Yong Wu
    Fa Cao
    Xiaohong Ji
    Journal of Materials Science: Materials in Electronics, 2020, 31 : 17365 - 17374
  • [39] Effects of a Pretreatment on Al-Doped ZnO Thin Films Grown by Atomic Layer Deposition
    Ko, Byoung-Soo
    Lee, Sang-Ju
    Kim, Dae-Hwan
    Hwang, Dae-Kue
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2015, 15 (03) : 2432 - 2435
  • [40] Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition
    Kim, H
    Horwitz, JS
    Qadri, SB
    Chrisey, DB
    THIN SOLID FILMS, 2002, 420 : 107 - 111
12345